It will include etch, cleaning, deposition and litho among 23 different types of equipment. All immersion litho machines are included in the restrictions.
“We are fulfilling our responsibility as a technological nation to contribute to international peace and stability,” said a statement from Japan’s Ministry of Economy, Trade and Industry.
“If our exports are not being re-appropriated for military use, we will continue shipments,” said Japan’s industry minister, Yasutoshi Nishimura, “we expect the impact on domestic companies to be limited.”
